Nikon M-22U Measuroscope QC-5200 Software
The Nikon M-22U Measuroscope is used to measure the lateral distance between two features on a substrate. The system uses video edge detection to reduce operator error by removing judgment inconsistencies. Resolution depends on magnification of objective and type of detection selected. Minimum resolution is 100 nm for 100x objective and video edge detection.
Video Edge detection
– Detects edges from distinct variations in field intensity
– Must have objective selection on the screen the same as the objective in use.
Probes
• Singly ‘fired’ by pressing the center scroll button on the mouse.
• Continuously fired by selecting ‘continuous fire’ on menu created by right clicking over video view.
To acquire points:
1. Select a feature measurement (on upper center menu) or use Measure Magic
2. Select a probe
a. One of those listed above, or
b. New probe can be used by selecting a point or multiple points depending on if measuring a point, line, or arc/circle (1, 2, or 3 points, respectively). The last point selected should be ‘dragged’ across the edge by the mouse to create the proper probe.
3. Position the probe over the video image
4. Size the probe
5. Select direction of scan (light to dark, dark to light, or first edge)
6. Click the center mouse button to fire
Get pdf Nikon M-22U Measuroscope QC-5200 Software
