AB-M Mask Aligner (OL-2) User Manual
Lightsource System and Intensity
A 1000Watt DUV lightsource used in this system has a broad band spectrum from 200nm to 450nm. However, the current system is configured in the mid-UV range of 350-450nm by using band-pass mirrors. The light intensity at 405nm wavelength is about 50 mW/cm2, and is 24 mW/cm2 at 365nm wavelength.
Wafer Chuck Selection:
3” Chuck: For 3” samples, round or aquare
2” Chuck: For 2” samples, round or square
Small Chuck: For 5 mm to 1” samples, square
Typical Operating Procedure
1. Start-up Lightsource
In the event that system is in a full ‘shutdown’ condition (i.e., system and lightsource power off), you must first bring the lightsource into operation. To start up the lightsource, complete the following procedures
1.1 Turn the POWER switch on the front of the intensity controller to the ON position. Press the “power on/off” button on the aligner (left-hand side) so it lights up. Warm up for 5 minutes.
1.2 Press and hold “START” switch to produce ignition of the mercury arc lamp.
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